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Tool Name: Poly Etcher
Maker: LRC
Model: Alliance4.1
Serial Number: 8196
Wafer size: 200mm
Vintage: 1996
System Configuration:
Alliance 4.1Transfer Module
9400SE Process Module x 2
Taitec CH-800B
ATS MX-20
PM1 ; ARC
Gas ; O2, He, CF4, O2, N2, C2F6, SO2
Turbo SEIKO
AE RFDS x 2
PM2 ; Poly-Si Etcher
Gas ; O2, He, H2, SF6, CHF3, HBr, Cl2
Turbo SEIKO
AE RFDS x 2
This equipment is located in JP
Manufacturer | Lam reserch cor |
Model | Alliance4.1 |
Year | 1996 |
Country | Japan |
Condition | Good |
Main category | PCB and SMT equipment |
Subcategory | Semiconductor Equipment |
ID | P30708002 |
Client type | Machinery dealer |
On Kitmondo since | 2013 |
Number of listings | 0 |
Country | Japan |
Last activity | July 8, 2013 |