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Aspen 2 Dual ICP Maker : Mattson
Application : Asher / Stripper
Model : Aspen 2 ICP
Vintage : 2001
Wafer Size : 6" or 8" ( Configured as customer's request)
Details Configuration :
1. Cassette platform : AGV
2. Cool Down Chamber : Installed , New type
3. Slit door : New type
4. Robot Assy. : Standard, New type
5. Cassette door : 26"
6. RF generator : Adtek X 4
7.
Heat/Cool Block: Heater , New type with Cicular Groove pattern
8. RF Matching box : Trazar AMU 10D X 4
9. Gas: 3 gases with STEC MFC
10. Gas Box : New type
We can retrofit the tool and meet your config 100% same as your request.
This equipment is located in TW
Manufacturer | Mattson technol |
Model | Aspen II |
Year | 2001 |
Country | Taiwan |
Condition | Good |
Main category | PCB and SMT equipment |
Subcategory | Semiconductor Equipment |
ID | P30102004 |
Client type | Machinery dealer |
On Kitmondo since | 2013 |
Number of listings | 6 |
Country | Taiwan |
Employees | 11 - 50 |
Established | 9 |
Company description |
The company has been doing in Inductively Coupled Plasma (ICP)technology and used Mattson Aspen 2 system refurbish for several years. Our company has got the advanced plasma technology in the wor… read more The company has been doing in Inductively Coupled Plasma (ICP)technology and used Mattson Aspen 2 system refurbish for several years. Our company has got the advanced plasma technology in the world. We are specialized in semiconductor and LED process technology & equipment. We focus our clients on the fields of LED, Semiconductors (Front end and Back end), Printed circuit boards (PCB), etc, and provide the key technologies to the rapidly developing semiconductor and LED industry. In order to achieve our goal to keep in the lead of advanced plasma technologies and have a sustainable development, we develop new techniques continuously to improve the performance for our customers. To enhance our R&D ability and competitiveness, we also collaborate with National Nano Device Laboratories to commercialize our R&D results and help our customers to develop the advanced plasma clean, PR stripping, Descum and organic removal process, etc. . We solve the problems that our customers meet in the process of phot-resist removal ,Descum and plasma clean, etc. Even see their needs in the future plasma process of 6 ~8 inches LED and semiconductor. Thus, we can assist customers to develop the top technologies in the world without relying on foreign expensive equipments. Furthermore, making educational training to customers is also a highlight of our strategies. To enhance customer’s understanding of machine and process, we would like to offer training form the basic theories of plasma and material to electricity & mechanics theories |
Last activity | April 6, 2023 |