Nikon NSR2205-i12D

Listing description

2 sets of Nikon NSR2205-i12D for sale.

1. Maker : Nikon
2. Model : NSR-2205i12D
3. Quantity : 2 sets
4. Decommissioned : 18 January 2012
5. Condition : Excellent

6. Configuration
1) Silicon Wafer 200mm (8 inch) Configured, Flat Zone Type
2) Reticle Size : 150mm (6 inch)
3) Reticle Library : Nikon 10 Slot
4) Electric source : NEMA BOX
5) Chamber Size : Short Body (1,800mm)
6) Controller : Vax Station
7) HP Laser : 5517C
8) LSA Laser : 5mW
9) OF Detection : Nikon Original Type
10) Wafer Loader : Type 2 (A3)
11) Wafer Carrier Table : Left/Right, in-Line (right)
12) PPD : installed
13) Rack : Standard Type

This equipment is located in KR