NIKON Optistation 3 A

Listing description

Cassette to Cassette Handling of 150mm Wafers

Non-Contact Wafer Pre-Alignment

Trinocular Head with Motorized Nosepiece and Motorized Auto Focus

NIKON BD Plan Objectives: 5X, 20X & 40X

NIKON BD Plan APO Objective: 100X

NIKON 10X Widefield Eyepieces

EPI Illuminator (Brightfield/Darkfield) with 50 Watt Halogen Lamp

6” (dia.) Wafer Stage with 6" x 6" XY Programmable Motion & Joystick Manual Override

Observing Points – 150 Channels with Max. 50 Point Memory per Channel

2ea X Axis Wafer Transfer Shuttles

2ea Y Axis Wafer Transfer Shuttles

2ea Send/Receive Cassette Elevators

This equipment is located in AT