Tokyo Electron Unity IIe 85 DD

Listing description

GENERAL DESCRIPTION
Location: San Jose, CA
ToolID: 300020 (IN STOCK and 100% OWNED)
Wafer Diameter: 200mm
Serial Number: LLZ532
Software Version: 3.60
System Power Rating: AC208V, 50Hz / 60Hz, 3-Phase, 225A
Loading Configuration: Single Cassette / Single Wafer

PROCESS CONFIGURATION
POS DESCRIPTION
GAS USED
1 Cassette Chamber 1 N2
2 Cassette Chamber 2 N2
3 Transfer Chamber N2
4 Process Chamber 1 N2 O2 Ar CF4 C4F6 C4F8 CHF4
5 Process Chamber 2 N2 O2 Ar CF4 C4F6 C4F8 CHF4
6 PA Chamber
N2

SYSTEM CONFIGURATION
1 Model Unity Version IIe 85 DDA Plasma Etching Equipment
2 Ceramic Electrostatic 2 Chuck hardware for wafer, Dual He cooling system
3 Cassette load lock 2 protection for Process chamber
4 ENI RF Generator
5 ENI Special Automation Matching Network
6 Neslab Dual High Temperature Chiller
7 Optical Wafer Orientation System
8 Optimized Chamber for 200mm Wafer Processing
9 Mechanical Robot Arm with two(2) Blades
10 Seiko Seiki Turbo-molecular Pump
11 Additional EMO for Dry Pump
12 Maintenance Controller
13 Direct Pressure Monitor

This equipment is located in US