EVG 620 Mask Aligne

Listing description

EVG 620 MASK ALIGNER SYSTEM consisting of:

- Model: EVG 620
- Automated Mask Aligner
- Topside Alignment (TSA)
- Bottomside Alignment (BSA)
- Automatic Alignment
- 3 Cassette Station Ergo Load Cassette Station
- Cassette to Cassette Handling (can also be operated in manual mode)
- Up to 6/150mm Wafer Capable (with proper chuck)
- 10x Objectives (Qty 4)
- Vacuum Chuck: request at time of order
- Maskholder: request at time of order
- Can be Operated in Proximity, Soft Contact, Hard Contact or Vacuum Contact Exposure Modes
- Tooling Exchanges are Quick, Simple and can be Performed Within Minutes
- Exposure Optics: Type C, 350nm - 450nm, Broadband
- Lamphouse: 350W Lamphouse
- Motorized Alignment Stage (X, Y, Theta Directions) to the 3-Axis Joystick
- Microsoft Windows based User Interface
- System PC, Keyboard, Cables
- Operations Manual for EVG 620
- Sold with 6 Month and OEM Specifications Guarantee!

CLASSONE''S MASK ALIGNER REFURBISHMENT PROCESS consists of:

1) Main System Body:
- Ellipsoidal Mirror Replaced with New
- UV Bulb Replaced with New
- Cold Light Mirror Inspected & Replaced as Needed
- Front Turning Mirror Inspected & Replaced as Needed
- Front Lens Inspected & Replaced as Needed
- Shutter Cylinders Replaced with New
- Mirror House Cylinder Replaced with New
- Lamp Power Supply Tested & Repaired or Replaced as Needed
- Exposure Optics Tested
- Microscope Illumination Bulbs Replaced with New
- Microscope Assembly Inspected and Adjusted as Needed
- Full Optical Alignment of Microscope Performed as Needed
- Machine is Fully Tested to Verify Compliance to Original Specifications
- WEC Head Rebuilt
- Pneumatic Regulators Inspected & Replaced as Needed
- Machine Covers are Repainted or Replaced as Needed
2) Isolation Table:
- Isolation Table Air Bags Inspected & Replaced as Needed
- Pneumatic Regulators Inspected & Replaced as Needed
- Air lines Inspected & Replaced as Needed
- Wheels Inspected & Replaced as Needed
- Leveling Feet Inspected & Replaced as Needed

3) If Applicable:
- Transport Slide Rebuilt
- Pre-Aligner Assembly Rebuilt
- Wafer Alignment Stage Rebuilt
- Cassette Elevator Rebuilt

INSTALLATION AND SUPPORT WORLDWIDE OF EVG MASK ALIGNERS:

- ClassOne Supports all its Used and Refurbished EVG Mask Aligners with Spare Parts and Service Worldwide
- Installation & Training Available Worldwide
- Learn more: http://www.classoneequipment.com/content/mask-aligners

This equipment is located in US