KLA-Tencor Prometrix RS100

Listing description

KLA-TENCOR PROMETRIX RS100 FOUR POINT PROBE RESISTIVITY MAPPING SYSTEM consisting of:

- Model: Prometrix RS100
- Four Point Probe, Resistivity Mapping System
- Fully Automated
- Currently setup for 8” Wafers
- Single Open Cassette Wafer Handler
- Integrated “on-stage” optical wafer orienter
- Integrated ceramic probe conditioning pad
- Measurement Range: 5m/sq - 5M/sq
- Repeatability (VLSI): < 0.2% (1)
- Accuracy (VLSI): ±1%
- Edge Exclusion: 1mm from edge of film
- Temperature Accuracy: ±0.5oC
- Temperature Repeatability: ±0.2oC
- Throughput (5-site): 85WPH
- Alignment System: Camera
- 15” LCD Monitor
- Pentium III computer
- Windows XP GUI
- Provides Contour Maps, 3-D Plots and Diameter Scans.
- Can compensate sheet resistance measurements against ambient temperature and materials TCR.
- Refurbished and Calibrated to meet Original Specifications (NIST Traceable)
- Power: 115V, 50/60 Hz
- Operations Manual for Prometrix RS100

CLASSONE''S KLA-TENCOR REFURBISHMENT PROCESS consists of:

- Replace used Laser with New Laser (if applicable)
- Replace used Photomultiplier Tubes (PMTs) with Brand New PMTs, if applicable
- Replace used Power Supply, as required
- Replacement or repair of any bad circuit board
- Mechanical assemblies cleaned, lubricated, rebuilt, or replaced as needed
- Optics assemblies cleaned and aligned to meet performance specifications or
replaced as needed
- Electronic assemblies tested to meet performance specifications or replaced as
needed
- Puck assembly rebuilt or replaced (if applicable)
- Replace old monitor with Brand New LCD Monitor
- Calibrate system using calibration wafers
- Machine covers are cleaned, polished, or replaced, as needed
- Performance specifications returned to original factory specifications
- Machine is fully tested to verify compliance to OEM specifications
- System de-installed following proper procedures
- System transport locks installed, system prepared for shipment
- Refurbishment carried out by KLA-Tencor trained technicians

This equipment is located in US