KLA-Tencor Prometrix RS55/

Listing description

KLA-TENCOR PROMETRIX RS55/TC FOUR POINT PROBE RESISTIVITY MAPPING SYSTEM consisting of:

- Model: RS55/tc
- Temperature Compenstation Configuration (RS55/TC)
- Up to 8/200mm Wafers
- Manual Wafer Handling (Table Top)
- Provides Contour Maps, 3-D Plots and Diameter Scans
- Can Compensate Sheet Resistance Measurements against Ambient Temperature and Materials
- Power: 115V, 50/60 Hz
- Operations Manual for Prometrix RS55/tc

Benefits of Temperature Compensation (TC):

Temperature variations can impact sheet
resistance measurements by as much as one
percent per degree Celsius. Correcting for
these temperature variations can have a
dramatic effect on long-term repeatability,
accuracy, and system-to-system matching.

This equipment is located in US