Kurt J Lesker S CMS-18

Listing description

Kurt J Lesker R&D sputter tool for the exploration of unique materials and thin film devices:

•Dual chamber with load lock (3 cathodes in each chamber)
•PLC process control (programmable depositions)
•Substrates up to 8” diameter
•Substrate rotation (improved uniformity)
•Substrate bias, rf & DC (improved adhesion and density)
•Substrate heater, up to 500C (improved surface mobility)
•3” magnetron sputter cathodes (multiple materials without venting)
•Rf & DC power supplies (DC for metals, rf for non-conducting materials)
•Co-sputter capability

Breakdown:

• Original Price $1.8million (2010)
• Low use hours with numerous accessories
• Current asking price $500k
– Includes Targets and many spare parts
• Additional Options (added cost associated)
– Installation and qualification by KJL
– Training, Procedures and assistance
– Recipes, Hard Drives and Full Support

This equipment is located in US