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Two systems are available for sale.
Used tools, in working order,
currently not in production, warehoused in a fab in Moscow, Russia.
Features:
Module: Thin Film
Number of Chambers: 4
Wafer size: 200 mm (8"), notched
Process Application: PVD Cu Barrier Metal
HCM (2xTa, Cu); Damaclean; clamped degas
25 Wfr (Pod) / SMIF LPT2200 (Asyst)
Transfer robot: Bi-symetric arm-set, MAG 7
Ta-Polycold chiller open loop
NESLAB Chiller
Remote service console
Cu-Mydax chiller
CE-marked
This equipment is located in RU
Manufacturer | Novellus |
Model | C2 INOVA |
Year | 2000 |
Country | Russia |
Condition | Good |
Main category | PCB and SMT equipment |
Subcategory | Semiconductor Equipment |
ID | P80628007 |
Client type | End User |
On Kitmondo since | 2018 |
Number of listings | 0 |
Country | Russia |
Last activity | June 29, 2018 |