Oxford Plasmalab 100 I

Listing description

OXFORD PLASMALAB 100 ICP ETCHER consisting of:

- Model: Plasmalab 100 ICP
- Inductive Coupled Plasma Source (180 ICP)
- Max Capable: 6/150mm diameter
- Current set up to run 4/100mm Wafers
- Chuck type: Mechanical Clamping
- Load-locked single chamber (ICP)
- Advanced Energy RFX600 13.56 Mhz RF Generator
- Advanced Energy RFX3000 13.56 Mhz RF Generator
- Alcatel ATH1300M Maglev Turbo Pump
- Alcatel ACT 1300M Controller
- HP Compaq Computer w/ Win NT 4.0
- PC2000NT Software Ver. 2.57.92
- LCD Monitor, Keyboard, and Mouse
- 2 Leybold Vacuum Pumps
- EMO Button
- Operations Manual
- Offered as Fully Refurbished!
- Manufactured in: 2002

GAS POD CONFIGURED WITH 6 MFCS consisting of:
- CHF3
- SF6
- O2
- Ar
- C4F8
- BCL3

CLASSONE REFURBISHMENT PROCESS FOR OXFORD RIE & ICP ETCHERS consisting of:

- Chamber disassembled for refurbishment.
- Chamber received full wet clean.
- Chamber o-rings and seals are replaced with brand new.
- Electrostatic Chuck (ESC) sent out for refurbishment (if applicable)
- All MFCs rebuilt and calibrated professionally.
- All corrosive gas lines replaced with brand new.
- All Non-corrosive gas lines cleaned.
- Vacuum pumps professionally rebuilt.
- Turbo pump professionally rebuilt.
- Chillers serviced and fully tested.
- All wiring/wire harnesses are checked, repaired or replaced if needed.
- All liquid and air lines, tubing and fittings checked and replaced if necessary.
- Major components disassembled for checkout, servicing, cleaning, and lubricating. Parts are repaired or replaced as needed.
- Checkout of all electronic and mechanical parts.
- Machine covers are cleaned, polished or replaced as needed.
- Equipment is fully tested to verify compliance to specifications.
- Post-refurbishment system leak and RF calibration checks, with documentation provided to customer.
- System cycle and repeatability testing completed prior to cover replacement and wipe down.
- System components carefully packed, labeled, and professionally crated.

This equipment is located in US