Semitool Equinox Plating

Listing description

SEMITOOL EQUINOX EQ626PRCuPLTNG200 PLATING SYSTEM consisting of:

- Model: Equinox EQ626PR CuPLTNG200
- Configured for 200mm Wafers
- 3 Plating Chambers
- 2 Heated Plating Tanks
- 3 SRDs
- 2 Chemical CDU Supply
- 1 Tank Ultrasonic Level Sensor
- 2 Sample Ports
- ARU Interface
- Tank Heat Exchange Connections
- 208VAC, 80A, 50/60Hz
- Operations Manual and Flow Schematics
- Fully refurbished by Semitool trained technicians
- Available for full inspection and demonstration

REFURBISHMENT PROCESS FOR SEMITOOL EQUINOX SYSTEMS consists of:

- All CDA/N2 pneumatic lines inspected and replaced as needed
- All chambers removed, inspected for damage, repaired/ or replaced (as needed)
- All delivery valves inspected, tested, and replaced as needed
- All drain/ return valves inspected, tested, replaced as needed
- All Lift/ Rotates removed for complete rebuild
- All nozzles inspected and replaced as needed
- All PFA tubing inspected, cleaned, or replaced as needed
- All wiring completely inspected and replaced as needed
- Automation set up and cycled for testing wafer handling
- Dynatronix plating supply tested with dummy loads and repaired as needed
- Flow meters inspected and replaced as needed
- New Anodes
- New N2 filters installed
- New O-Rings installed in filter housings
- Plating pumps removed, inspected, cleaned / or rebuilt as needed
- Prealigner tested and replaced as needed
- Indexer tested and refurbished as needed
- Full cycle/ testing

This equipment is located in US