SPTS Multiplex ICP S

Listing description

SPTS MULTIPLEX ICP SR ETCHER consisting of:

- Model: MESC ICP
- Process SiC, III-V, or Metal Etch
- Single process chamber with manually loaded vacuum loadlock
- Inductively Coupled Plasma Source (ICP)
- Currently Configured for 8/200mm Wafers
- Carousel Load Lock (Single-Wafer Carousel or multiple wafers on carrier)
- Heated Lower Chamber
- Load-Lock Chamber
- Helium Substrate Backside Cooling
- 200mm Weighted Clamp
- Ebara AA10N Vacuum Pump (Chamber)
- Ebara AAL10 Vacuum Pump (Load Lock)
- Affinity Chiller
- E-Rack
- 13.56MHz RF Generator (Source)
- 13.56MHz RF Generator (Lower Electrode)
- Leybold MAG 900 CT Turbo Pump
- System Cables (full set)
- User Manuals & Documentation
- Year of Manufacture: 2004
- Serial Number: 50543

On Board Gas Box with Following Gas Configuration:

- O2 @ 50 SCCM

- SF6 @ 100

- Ar @ 50 SCCM

- He @ 50 SCCM

- CF4 @ 100 SCCM

- CHF3 @ 100 SCCM

- NF3 @ 100 SCCM

FULLY REFURBISHED SYSTEM MEETING ORIGINAL SPECIFICATIONS:

- Chamber disassembled for refurbishment.
- Chamber received full wet clean.
- Chamber o-rings and seals are replaced with brand new.
- Electrostatic Chuck (ESC) sent out for refurbishment (if applicable)
- All MFCs rebuilt and calibrated professionally.
- All corrosive gas lines replaced with brand new.
- All Non-corrosive gas lines purged.
- Vacuum pumps professionally rebuilt.
- Turbo pump professionally rebuilt.
- Chillers serviced and fully tested.
- All wiring/wire harnesses are checked, repaired or replaced if needed.
- All liquid and air lines, tubing and fittings checked and replaced if necessary.
- Major components disassembled for checkout, servicing, cleaning, and lubricating. Parts are repaired or replaced as needed.
- Checkout of all electronic and mechanical parts.
- Machine covers are cleaned, polished or replaced as needed.
- Post-refurbishment system leak and RF calibration checks, with documentation provided to customer.
- System cycle and repeatability testing completed prior to cover replacement and wipe down.
- A software license may be obtained directly from SPTS
- SPTS does not certify any third party equipment refurbishments
- System components carefully packed, labeled, and professionally crated.

This equipment is located in US