Thermo Scientif Microlab 350

Listing description

Thermo Scientific VG Scanning Auger Microanalyzer Microlab 350
Auger microscope VG Scientific M LAB
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Thermo Scientific MICROLAB 350 is a high performance scanning Auger instrument using field emission technology to provide excellent spatial resolution.
MICROLAB 350 scanning Auger microprobes have established an excellent reputation in leading industrial and academic laboratories. MICROLAB 350 has the highest spatial resolution for:
• Auger electron spectroscopy (AES)
• Scanning electron microscopy (SEM)
• Scanning Auger microscopy (SAM)

Resolution, Sensitivity, Precision and Reliability

Spatial Resolution

Scanning Electron Microscopy
High magnification SEM and SAM images can be produced quickly and easily via the highly interactive and intuitive digital control panel.

• Guaranteed resolution of 7 nm at 1 nA beam current

Scanning Auger Microscopy
• Guaranteed Auger mapping resolution of 12 nm at 1 nA beam current.

Micro Area Analysis

Spectroscopic analysis of small features is fast and precise.

• Small spot size
• Very low stage drift

Sensitivity

The spherical sector analyzer on MICROLAB 350 provides rapid analysis and high detectability.

• Large solid cone of electron acceptance
• High transmission
• High detector efficiency
• Superior geometry

Energy Resolution

The analyzer energy resolution is continuously variable. Low resolution (0.5%) can be selected for high sensitivity and detectability while high resolution (0.02%) can be used to:

• Resolve peak interferences
• Resolve different chemical states of the same element
• Resolve the small energy difference between dopant types in a semiconductor
• Produce Reflected Electron Energy Loss Spectra (REELS) and images

Depth Resolution

MICROLAB 350 provides sputter profiles with:

• High sensitivity
• High depth resolution
- Low ion energy
- Azimuthal rotation
- Optimum geometry for ion gun
- Sample tilt minimizes electron escape depth

Charge Compensation

• Low energy ion flux for charge balance in AES, SEM and SAM
• Improved chemical information

Versatility

The analytical power of the instrument can be enhanced by the addition of other analytical techniques including:
• XPS
• EDS
• Backscattered electron detection

Avantage

The Thermo Scientific Avantage data acquisition and processing system incorporates all the features necessary to extract the maximum amount of information from the analysis and has a comprehensive set of data and image processing tools.

• Peak identification
• Quantification
• Peak fitting
• Non-linear least squares fitting
• Multi-dimensional data display
• Simultaneous peak and background acquisition
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This equipment is located in IL