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Airco Temescal HRS 2550 P240311905
Airco Temescal HRS 2550 P240311905

Airco Temescal Hrs 2550 Sputtering system Verified seller

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Manufacturer Airco
Model Temescal HRS 2550
Year
Location USA US
Category PCB miscellaneous
Product id P240311905
Language
bg Система за разпрашване Airco Temescal Hrs 2550
cs Rozprašovací systém Airco Temescal Hrs 2550
da Airco Temescal Hrs 2550 Sputtering-system
de Airco Temescal Hrs 2550 Sputtering-System
el Airco Temescal Hrs 2550 Σύστημα σπατουλαρίσματος
en Airco Temescal Hrs 2550 Sputtering system
es Sistema de pulverización catódica Airco Temescal Hrs 2550
fr Système de pulvérisation cathodique Airco Temescal Hrs 2550
hr Klima uređaj Temescal Hrs 2550 Sustav prskanja
hu Airco Temescal Hrs 2550 porlasztó rendszer
it Sistema di sputtering Airco Temescal Hrs 2550
lt "Airco Temescal Hrs 2550" dulkinimo sistema
nl Airco Temescal Hrs 2550 Sputtersysteem
pl System rozpylania Airco Temescal Hrs 2550
pt Sistema de pulverização catódica Airco Temescal Hrs 2550
ro Sistem Sputtering Airco Temescal Hrs 2550
ru Система напыления Airco Temescal Hrs 2550
sr Klima uređaj Temescal Hrs 2550 Sistem za prskanje
sv Airco Temescal Hrs 2550 Sputtering-system
tr Airco Temescal Hrs 2550 Püskürtme sistemi

Specifications

Functionality other
-------------------
Worked hours
Hours under power
State good
At local norms ---------
Status

Description

Manufacturer: Airco
AIRCO TEMESCAL HRS 2550 SPUTTERING SYSTEM
3 TARGETS
AUTO/MANUAL VALVING
DIRECT DRIVE MECHANICAL PUMP
DIFFUSION PUMP
CAN BE UPGRADED WITH ROTATING FIXTURE TO HOLD (4) 8" WAFERS

The Airco Temescal HRS 2550 is a sputtering system. It has 3 targets, auto/manual valving, direct drive mechanical pump,and diffusion pump. Also has a r/f power supply. Can Upgrade to rebuilt CTI-10 Cryopump head with compressor.
Technical Data
Dimensions: 16 inches high x 25.5-inch
diameter (406 mm x 647.7 mm)
Fixturing: carousel vertical mounted substrate holders, optional flip-flop capability
Capacity: (minimum) 64 2-inch (51 mm) wafers
Shielding: minimum-3-bounce
Substrate heat: maximum 3 kW
Number of cathodes: maximum of three Argon inlet bellows-sealed manual valve with metering capability

Vacuum cubicle (including electronics enclosure): 82.5 inches high (with cabinet
top console) x 64 inches wide x 40 inches deep (2100 mm x 1625 mm x 1025 mm)
Power supply (Including control consoles):
36 inches high x 25.5 inches wide x 25.5 inches deep (915 mm m x 650 mm x 650 mm)
Typical static deposition rates: 15,000
A/minute aluminum, 20,000 A/minute copper
Distribution: � 5% with source masking
Target size: 8.25 inches x 3.56 inches (210 mm x 90 mm)
Operating voltage: -400 to -800V dc cathode potential (peak deposition rates at
-400 to -500V dc)
Maximum operating power level: 5 KW. 0.2 to 7A
Operating pressure: 1 x 10-2 to 1 x 10-3 torr
Cooling water: (0.5gpm at 20�C)per source

Output: 5 kW, current-adjustable from 0.2A
to 7A; voltage from 50V dc to 800V dc;
pressure-dependent
Duty cycle: 100%
Metering: output current, 0 to 1A, and 0 to
10A, dc scale; cathode-to-ground voltage,
0 to 1.5 kV dc; anode-to-ground voltage,
0 to 150V dc
Interlocks: power supply, cubicle doors,water, chamber lid and chamber pressure
Required service: 208/230V ac, 25A, 50/60 Hz, 3 phase

Ultimate vacuum: 10-8 torr range
Diffusion pump: 5300 liter/second, 10 inches high x 16-inch i.d
Mechanical pump: 35 cfm (1000 liter/second, dual stage
Cold trap: 4.5 liter capacity; 2600 square inch (1.67 m2) surface area
High vacuum valve: 16-inch (406 mm) i.d., bellows-sealed
High vacuum bypass valve: 3-inch (75 mm) i.d., variable conductance
Famine valve and roughing valve: 2-inch (51 mm) i.d
Valve actuation: electropneumatic (all vacuum valves)
Valve sequencing: manual and automatic

Please note that this description may have been translated automatically. Contact us for further information. The information of this classified ad are only indicative. We recommend to check the details with the seller before a purchase


Client type Reseller
Active since 2014
Offers online 46
Last activity Dec. 19, 2024

Description

Manufacturer: Airco
AIRCO TEMESCAL HRS 2550 SPUTTERING SYSTEM
3 TARGETS
AUTO/MANUAL VALVING
DIRECT DRIVE MECHANICAL PUMP
DIFFUSION PUMP
CAN BE UPGRADED WITH ROTATING FIXTURE TO HOLD (4) 8" WAFERS

The Airco Temescal HRS 2550 is a sputtering system. It has 3 targets, auto/manual valving, direct drive mechanical pump,and diffusion pump. Also has a r/f power supply. Can Upgrade to rebuilt CTI-10 Cryopump head with compressor.
Technical Data
Dimensions: 16 inches high x 25.5-inch
diameter (406 mm x 647.7 mm)
Fixturing: carousel vertical mounted substrate holders, optional flip-flop capability
Capacity: (minimum) 64 2-inch (51 mm) wafers
Shielding: minimum-3-bounce
Substrate heat: maximum 3 kW
Number of cathodes: maximum of three Argon inlet bellows-sealed manual valve with metering capability

Vacuum cubicle (including electronics enclosure): 82.5 inches high (with cabinet
top console) x 64 inches wide x 40 inches deep (2100 mm x 1625 mm x 1025 mm)
Power supply (Including control consoles):
36 inches high x 25.5 inches wide x 25.5 inches deep (915 mm m x 650 mm x 650 mm)
Typical static deposition rates: 15,000
A/minute aluminum, 20,000 A/minute copper
Distribution: � 5% with source masking
Target size: 8.25 inches x 3.56 inches (210 mm x 90 mm)
Operating voltage: -400 to -800V dc cathode potential (peak deposition rates at
-400 to -500V dc)
Maximum operating power level: 5 KW. 0.2 to 7A
Operating pressure: 1 x 10-2 to 1 x 10-3 torr
Cooling water: (0.5gpm at 20�C)per source

Output: 5 kW, current-adjustable from 0.2A
to 7A; voltage from 50V dc to 800V dc;
pressure-dependent
Duty cycle: 100%
Metering: output current, 0 to 1A, and 0 to
10A, dc scale; cathode-to-ground voltage,
0 to 1.5 kV dc; anode-to-ground voltage,
0 to 150V dc
Interlocks: power supply, cubicle doors,water, chamber lid and chamber pressure
Required service: 208/230V ac, 25A, 50/60 Hz, 3 phase

Ultimate vacuum: 10-8 torr range
Diffusion pump: 5300 liter/second, 10 inches high x 16-inch i.d
Mechanical pump: 35 cfm (1000 liter/second, dual stage
Cold trap: 4.5 liter capacity; 2600 square inch (1.67 m2) surface area
High vacuum valve: 16-inch (406 mm) i.d., bellows-sealed
High vacuum bypass valve: 3-inch (75 mm) i.d., variable conductance
Famine valve and roughing valve: 2-inch (51 mm) i.d
Valve actuation: electropneumatic (all vacuum valves)
Valve sequencing: manual and automatic

Please note that this description may have been translated automatically. Contact us for further information. The information of this classified ad are only indicative. We recommend to check the details with the seller before a purchase

Specifications

Functionality other
-------------------
Worked hours
Hours under power
State good
At local norms ---------
Status

About this seller

Client type Reseller
Active since 2014
Offers online 46
Last activity Dec. 19, 2024

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Airco Temescal Hrs 2550 Sputtering system