Description
RTP ANNEALSYS AS-Micro oven from 2017 + pump + computer
Perfect condition. Date of 2017.
Delivered with :
- Agilent IDP3A01 vacuum pump and evacuation pump
- control computer, software and user code.
- manual
The AS-Micro is a compact three-inch benchtop thermal processor with vacuum capability dedicated to research applications. It can process substrates from a few square millimetres up to 3 inches in diameter or square. Optional susceptors are available to hold small samples and to process substrates with low infrared absorption.
The quartz tube processing chamber with stainless steel flanges and a tubular furnace with infrared halogen lamps allows processing up to 1250°C with very fast ramp rates (> 250°C/s). The state-of-the-art temperature controller ensures precise temperature control.
Horizontal movement door with quartz tray provides easy access for wafer loading and unloading and thermocouple installation.
Features
Furnace offers the highest ramp rate up to 250°C/s for 2" wafers.
Temperature range: RT to 1250°C
Ramp rate up to 250°C/s on 2 inch diameter silicon substrate, 200°C/s on 3 inch substrate.
Gas mixing capability with mass flow controllers
Vacuum range: Atm to 10-2 Torr (10-6 Torr with optional turbo pump)
Thermocouple temperature control with fast digital PID temperature controller
Full PC control with Windows compatible software
for electrochemistry and nanomaterials semi-conductor / semiconductor / wafer laboratory
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