Description
Cascade Microtech Summit 12000 prober with Optem A-Zoom 2, microchamber, Temptronic 200mm temperature controlled wafer chuck
-65°C to 160°C Chuck.
Microchamber with top hat assembly allows measurements to be made inside an integral, low noise, shielded and light-tight chamber.
Optem A-zoom 2 microscope with long working distance objective and fiber optic illuminator
Uses vacuum mount, magnetic-mount or fixed mount positioners.
High stability bridge mount for optics
200mm thermal vacuum chuck -65 to 200C temperature range
Temptronic TPO-3000A-2300-1 temperature controller and chiller
Kinetic Systems vibration isolation table
Optional: Probe card holder available
Cascade PC with Nucleus ver. 3.2.7 software and graphical user interface
Prober sn
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