Specifications

-------------------
Worked hours
Hours under power
State good
At local norms ---------
Status

Description

The tool is fully operational, running Cu on both sides. The auxiliary equipment is a power cabinet and two chillers (one for each side). Chemical dispense systems support the whole fleet so no chemical dispense equipment would be included. We run off of slurry loops under the floor as well as direct chemical distribution from a VMB for the cleaner chemical. The VMB and slurry loop support many tools.

As far as hardware config, there are 4 load-ports, 3 robots, two platens (one on each side). The tool has MPTI top-rings but they are able to be upgraded. The endpoint system is based on temperature.

Wafer Size : 300mm

Please note that this description may have been translated automatically. Contact us for further information. The information of this classified ad are only indicative. We recommend to check the details with the seller before a purchase


Client type Reseller
Active since 2007
Offers online 5
Last activity Dec. 2, 2024

Description

The tool is fully operational, running Cu on both sides. The auxiliary equipment is a power cabinet and two chillers (one for each side). Chemical dispense systems support the whole fleet so no chemical dispense equipment would be included. We run off of slurry loops under the floor as well as direct chemical distribution from a VMB for the cleaner chemical. The VMB and slurry loop support many tools.

As far as hardware config, there are 4 load-ports, 3 robots, two platens (one on each side). The tool has MPTI top-rings but they are able to be upgraded. The endpoint system is based on temperature.

Wafer Size : 300mm

Please note that this description may have been translated automatically. Contact us for further information. The information of this classified ad are only indicative. We recommend to check the details with the seller before a purchase


Specifications

-------------------
Worked hours
Hours under power
State good
At local norms ---------
Status

About this seller

Client type Reseller
Active since 2007
Offers online 5
Last activity Dec. 2, 2024

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