Specifications

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Worked hours
Hours under power
State as-is, where-is
At local norms ---------
Status

Description

iXH6045H Dry Vacuum Pump
Product Overview
The iXH dry pump series is specifically designed for demanding processes in semiconductor manufacturing, flat panel displays, and solar applications. It offers a reduced cost of ownership with 10% less energy consumption compared to previous models. The pump features enhanced powder handling with Gas Buster™ technology, a wide operating temperature range to minimize by-product accumulation, and improved seal technology to extend pump life and reduce leakage risks.

Specifications
Model: ACHD02123300XS
Voltage: 380-460V
High Voltage: 6000V
Gas Module: Single mode (44 sL/min flow)
Exhaust: Standard without check valve
Seals: Standard
Pump Motor: 11 kW
Booster Motor: 7.5 kW
Applications
High-k and low-k applications
SACVD, LPCVD, ALD, TCO, GaN, and EPI processes
CVD, PECVD, and MOCVD
Strip/ashing, oxide etch, metal etch, and implant source
Technical Specifications
Dimensions:
Length: 1080 mm
Width: 517 mm
Height: 966 mm
Performance:
Pumping Speed: 5000 - 5200 m³/h
Ultimate Vacuum: < 5 x 10⁻³ mbar
Maximum Inlet Pressure: 1000 mbar
Cooling:
Water Flow Rate: 12 l/min
Water Supply Pressure: 6.9 bar (100 psig)
Key Features
High hydrogen pumping speeds ideal for advanced EPI and solar processes
Compact design with a smaller footprint for easy integration into fabrication facilities
Compliance with UL, CE, and S2 standards
This pump is optimized for demanding environments where enhanced process capability, energy efficiency, and a compact design are crucial. For further details and operational guidance, please refer to the complete product manual.

Please note that this description may have been translated automatically. Contact us for further information. The information of this classified ad are only indicative. We recommend to check the details with the seller before a purchase


Client type Reseller
Active since 2024
Offers online 21
Last activity Nov. 16, 2024

Description

iXH6045H Dry Vacuum Pump
Product Overview
The iXH dry pump series is specifically designed for demanding processes in semiconductor manufacturing, flat panel displays, and solar applications. It offers a reduced cost of ownership with 10% less energy consumption compared to previous models. The pump features enhanced powder handling with Gas Buster™ technology, a wide operating temperature range to minimize by-product accumulation, and improved seal technology to extend pump life and reduce leakage risks.

Specifications
Model: ACHD02123300XS
Voltage: 380-460V
High Voltage: 6000V
Gas Module: Single mode (44 sL/min flow)
Exhaust: Standard without check valve
Seals: Standard
Pump Motor: 11 kW
Booster Motor: 7.5 kW
Applications
High-k and low-k applications
SACVD, LPCVD, ALD, TCO, GaN, and EPI processes
CVD, PECVD, and MOCVD
Strip/ashing, oxide etch, metal etch, and implant source
Technical Specifications
Dimensions:
Length: 1080 mm
Width: 517 mm
Height: 966 mm
Performance:
Pumping Speed: 5000 - 5200 m³/h
Ultimate Vacuum: < 5 x 10⁻³ mbar
Maximum Inlet Pressure: 1000 mbar
Cooling:
Water Flow Rate: 12 l/min
Water Supply Pressure: 6.9 bar (100 psig)
Key Features
High hydrogen pumping speeds ideal for advanced EPI and solar processes
Compact design with a smaller footprint for easy integration into fabrication facilities
Compliance with UL, CE, and S2 standards
This pump is optimized for demanding environments where enhanced process capability, energy efficiency, and a compact design are crucial. For further details and operational guidance, please refer to the complete product manual.

Please note that this description may have been translated automatically. Contact us for further information. The information of this classified ad are only indicative. We recommend to check the details with the seller before a purchase


Specifications

-------------------
Worked hours
Hours under power
State as-is, where-is
At local norms ---------
Status

About this seller

Client type Reseller
Active since 2024
Offers online 21
Last activity Nov. 16, 2024

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