Specifications

-------------------
Worked hours
Hours under power
State good
At local norms ---------
Status

Description

Aspen 2 Dual ICP Maker : Mattson
Serial number : 925
Application : Asher / Stripper
Model : Aspen 2 ICP
Vintage : 2001
Wafer Size : 6" or 8" ( Configured as customer's request)
Details Configuration :
1. Cassette platform : SMIF
2. Cool Down Chamber : Installed , New type
3. Slit door : New type
4. Robot Assy. : Standard, New type
5. Cassette door : 18"
6. RF generator : Adtek X 4
7. Heat/Cool Block: Heater , New type with Cicular Groove pattern
8. RF Matching box : Trazar AMU 10D X 4
9. Gas: 3 gases with STEC MFC
10. Gas Box : New type

Please note that this description may have been translated automatically. Contact us for further information. The information of this classified ad are only indicative. We recommend to check the details with the seller before a purchase


Client type Reseller
Active since 2019
Offers online 5
Last activity Oct. 23, 2024

Description

Aspen 2 Dual ICP Maker : Mattson
Serial number : 925
Application : Asher / Stripper
Model : Aspen 2 ICP
Vintage : 2001
Wafer Size : 6" or 8" ( Configured as customer's request)
Details Configuration :
1. Cassette platform : SMIF
2. Cool Down Chamber : Installed , New type
3. Slit door : New type
4. Robot Assy. : Standard, New type
5. Cassette door : 18"
6. RF generator : Adtek X 4
7. Heat/Cool Block: Heater , New type with Cicular Groove pattern
8. RF Matching box : Trazar AMU 10D X 4
9. Gas: 3 gases with STEC MFC
10. Gas Box : New type

Please note that this description may have been translated automatically. Contact us for further information. The information of this classified ad are only indicative. We recommend to check the details with the seller before a purchase


Specifications

-------------------
Worked hours
Hours under power
State good
At local norms ---------
Status

About this seller

Client type Reseller
Active since 2019
Offers online 5
Last activity Oct. 23, 2024

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Aspen 2 ICP Dual Chamber ICP system