Specifications

-------------------
Worked hours
Hours under power
State good
At local norms ---------
Status

Description

200mm LPCVD furnace
tube 1: TEOS/anneal
tube 2:Nitride/poly, gas connections: air low N2, N2, FG1, Ar, O2, SiH2Cl2(DCS), SiH4, NH3
2 Kashiyama vacuum pumps with blowers
Schumacher M-Dot dopant source controller
furnace dims: 66x36x78
gas module dims: 18x36x78
power req: 480v, 250amps max

Please note that this description may have been translated automatically. Contact us for further information. The information of this classified ad are only indicative. We recommend to check the details with the seller before a purchase


Client type Reseller
Active since 2019
Offers online 73
Last activity Jan. 7, 2025

Description

200mm LPCVD furnace
tube 1: TEOS/anneal
tube 2:Nitride/poly, gas connections: air low N2, N2, FG1, Ar, O2, SiH2Cl2(DCS), SiH4, NH3
2 Kashiyama vacuum pumps with blowers
Schumacher M-Dot dopant source controller
furnace dims: 66x36x78
gas module dims: 18x36x78
power req: 480v, 250amps max

Please note that this description may have been translated automatically. Contact us for further information. The information of this classified ad are only indicative. We recommend to check the details with the seller before a purchase


Specifications

-------------------
Worked hours
Hours under power
State good
At local norms ---------
Status

About this seller

Client type Reseller
Active since 2019
Offers online 73
Last activity Jan. 7, 2025

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