Hologenix NGS 3500 Defect Detection System

Listing description

Automatic Defect Detection & Classification
Automated Die Inspection
Precision Dimensional Metrology
Critical Dimension (CD) and Overlay Metrology
Automatic and Manual Operation
Surface & Edge Defect Detection
Texture Defect Detection (e.g. stains, etc.)
Missing or Deformed Object Detection
Extensive Defect Review Capability
Graphic Maps & Image Archival
CAD file import
The NGS Series defect detection and metrology systems are designed for applications where automated optical defect detection and precision dimensional measurements on wafers and other parts are required. They are well suited for dual use as production tools or as versatile process development systems. These systems offer a choice of high end microscope components (Olympus/Nikon/Leica), BF/ DF/ DIC illumination, and linear motor staging with 0.02 micron scales. There are several configurations available depending on your requirements. These include:a 200mm platform, a 300mm platform and a robotic platform for automated wafer and part handling.

Advanced wafer level dimensional metrology and defect detection system
motorized stage with 8"x8" XY travel
motorized focus
brightfield and darkfield inspection
5-100 defects/measurements per second typical
200mm/s staging speed
software controlled coaxial and backlight (transmitted light) with dual 150w fiber optic power supplies
maximum stage load capacity 50lbs
granite base and Z column
closed loop linear stages and Z axis with position feedback and Micro-e Mercury 3500 smart encoder systems provide better then 1um resolution
Software: RMS Vision Systems with color graphics, image archiving, and offline review of defects
Nikon microscope with motorized objective rotation, tilting ultrawide trinocular viewing head with 10x eyepieces
Hitachi CCTV, Windows XP

This equipment is located in US