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200mm LPCVD furnace
tube 1: TEOS/anneal
tube 2:Nitride/poly, gas connections: air low N2, N2, FG1, Ar, O2, SiH2Cl2(DCS), SiH4, NH3
2 Kashiyama vacuum pumps with blowers
Schumacher M-Dot dopant source controller
furnace dims: 66x36x78
gas module dims: 18x36x78
power req: 480v, 250amps max
This equipment is located in US
Manufacturer | MRL |
Model | Bandit 218 |
Year | - |
Country | USA |
Condition | Good |
Main category | PCB and SMT equipment |
Subcategory | Ovens & Furnaces |
ID | P403140111 |
Client type | Machinery dealer |
On Kitmondo since | 2019 |
Number of listings | 50 |
Country | USA |
Last activity | March 14, 2024 |
Contact | Click here |