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Model: 600 SemiAuto
- Semi-Automatic RF Plasma System
- Can process up to 200mm wafers
- Used for photoresist stripping and surface cleaning, as well as etching silicon and its compounds
- Chamber Size: 245mm diameter, 380mm depth
- Chamber Material: ceramic
- ENI RF Generator: 0-600 Watt, 13.56 MHz
- Gases: 4 channels controlled by 4 MFCs
- Leybold D65B Vacuum Pump
- Dimensions: 740mm x 624mm x 701mm + connections
- Electrical: 230V, 50/60Hz, 15A, 2kW
- 1731 hours
This equipment is located in US
Manufacturer | Tepla |
Model | 600-AL |
Year | - |
Country | USA |
Condition | Good |
Main category | Lab, Medical and Bioscience |
Subcategory | General Lab |
ID | P403140217 |
Client type | Machinery dealer |
On Kitmondo since | 2019 |
Number of listings | 50 |
Country | USA |
Last activity | March 14, 2024 |
Contact | Click here |