TEL U2e-855II

Listing description

For sale is a TEL U2e-655II upgraded to U2e-855II Oxide Etcher. It is located in Asia. Please check below for the configuration.

Configuration:

1) MFC(MASS FLOW CONTROLLER)

GAS NO. GAS MAME MFC SIZE(SCCM) MAKER MODEL

GAS #1 C4F8 50 SAM SFC-1480F

GAS #2 Ar 1000 SAM SFC-1480F

GAS #3 O2 20 SAM SFC-1480F

GAS #4 CHF3 100 SAM SFC-1480F

GAS #5 O2 100 SAM SFC-1480F

GAS #6 CF4 100 SAM SFC-1480F

GAS #7 N2 100 AERA FC-780XC

GAS #8 CF4 ( 0.419 ) 5 AERA FC-780XC

2) AC-2 Controller (MAIN PRESSURE CONTROLLER) APC(Auto Pressure Controller)

ITEMS Maker MODEL Attachment REMARK

APC VAT 61146-PH52-ABM1 OK

VAT 61146-PH52-ABM1 OK

3) Gauge GAUGE

Unit Maker Model Range REMARK

Baratron MILLIPORE CDLD-01S12E 1 PA/133.32 PC1

Baratron MILLIPORE CDLD-01S12E 1 PA/133.32 PC2

Baratron MKS 622A01 TDE 1 PA/133.32 TC

4) Load station hardware configuration SYSTEM

Description Maker Model REMARK

1.TMP MITSBISHI FT-1200W

MITSBISHI FT-1200W

2.TMP Controller MITSBISHI FT-1200W

MITSBISHI FT-1200W

3. ROBOT YASKAWA VS2C

4.Robot Controller YASKAWA SRC-?017

5. EPD TEL SE-2000

6. UPS

7.Generator PEAL RP-3000-27M PC1 TOP

PEAL LP-2000-800K PC1 BOT

PEAL RP-3000-27M PC2 TOP

PEAL LP-2000-800K PC2 BOT

8.Matcher PEAL M-30AW2VD-27M PC1 TOP

PEAL M-20A2LS-U2-4 PC1 BOT

PEAL M-30AW2VD-27M PC2 TOP

PEAL M-20A2LS-U2-4 PC2 BOT

6)
Function Check SUB MODULE

UNIT MAKER MODEL JUDGE REMARK

1.Dry Pump EDWARD IGX-100L OK CC

EDWARD IL-600 OK TC

EDWARD IH-80 OK PC1

EDWARD IH-80 OK PC2

2.Chiller SMC INR-341-42B1-X134 OK PC1

SMC INR-341-42B-X1134 OK PC2

This equipment is located in IE